4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Young-Kyou Park

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Exposing systems providing post exposure baking and related...

Photocopying – Projection printing and copying cameras – With developing
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High density plasma chemical vapor deposition process

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Sputtering apparatus for forming a metal film using a...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-2736398

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