4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Yoshinobu Kawai

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Method and apparatus for plasma processing

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method of measuring negative ion density of plasma and...

Electricity: measuring and testing – Using ionization effects
Reexamination Certificate

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Microwave plasma processing apparatus

Wave transmission lines and networks – Miscellaneous – Multipactor applications
Patent

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Plasma treatment method and system

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Profile ID: LFUS-PAI-P-1701048

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