4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Yin-Lang Wang

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Ar-based si-rich oxynitride film for dual damascene and/or...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method for improved cleaning in HDP-CVD process with reduced...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Template for measuring edge width and method of using

Geometrical instruments – Gauge – Template
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Profile ID: LFUS-PAI-P-2091573

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