4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Yen-Kun V. Wang

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Gap-fill depositions in the formation of silicon containing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Lift pin assembly for substrate processing

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3033310

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