4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Yeming Jim Ma

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Chemical vapor deposition of a copolymer of p-xylylene and a mul

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Method of depositing low K films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Method of depositing low k films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method of depositing low k films using an oxidizing plasma

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Plasma enhanced chemical vapor deposition of copolymer of...

Coating processes – Direct application of electrical – magnetic – wave – or... – Polymerization of coating utilizing direct application of...
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Profile ID: LFUS-PAI-P-770152

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