4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Yasuyoshi Hyodo

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Apparatus and method for forming low dielectric constant film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Apparatus and method for forming low dielectric constant film

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Insulation film on semiconductor substrate and method for...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Insulation film on semiconductor substrate and method for...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Insulation film on semiconductor substrate and method for...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

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