4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Angular rate using gyroscopic or coriolis effect

Yasushi Matsuhiro

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Angular velocity sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Method for manufacturing semiconductor devices by use of dry etc

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Vibration type angular velocity detector

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Profile ID: LFUS-PAI-P-1106932

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