4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Yasuhiko Ueda

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Dry etching method and method of manufacturing semiconductor...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Etching mask, process for forming contact holes using same,...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Etching mask, process for forming contact holes using same,...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device
Reexamination Certificate

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Hard mask technique in forming a plug

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Method of removing silicon nitride film formed on a surface...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-1575350

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