4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Product assembly or manufacturing

Yao-Wen Guo

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Method and system for improving critical dimension uniformity

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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System and method for improving immersion scanner overlay...

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3219062

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