4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching inorganic substrate

Xuan-Oi Wang

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Gas phase silicon etching with bromine trifluoride

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Gas-phase silicon etching with bromine trifluoride

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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