4. Coating apparatus
  5. Gas or vapor deposition
  6. Crucible or evaporator structure

Xiaoxiong Yuan

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Ceramic substrate support

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Ceramic substrate support

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Dispersion plate for flowing vaporizes compounds used in...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Head for vaporizing and flowing various precursor materials...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Lid assembly for a processing system to facilitate...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2126503

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