4. Etching a substrate: processes
  5. Gas phase etching of substrate

Xiaoxiong (John) Yuan

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Method and apparatus for preventing edge deposition

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Method for front end of line fabrication

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Method for front end of line fabrication

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2353274

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