4. Chemistry of inorganic compounds
  5. Sulfur or compound thereof
  6. Binary compound

Xiaoqiang Yao

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Pre-endpoint techniques in photoresist etching

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Ternary metal-rich sulfide with a layered structure

Chemistry of inorganic compounds – Sulfur or compound thereof – Binary compound
Patent

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Profile ID: LFUS-PAI-P-1916057

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