4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Xiao-min Li

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Ferroelectric thin film device and method of producing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Ferroelectric thin film device and method of producing the same

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate

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Ferroelectric thin film device and method of producing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method for making ferroelectric thin-film, sensor and the...

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate

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Parallel plate plasma CVD apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-1958998

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