4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Xianzhi Tao

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CVD ruthenium seed for CVD ruthenium deposition

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Doped silicon deposition process in resistively heated...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
Reexamination Certificate

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Emissivity-change-free pumping plate kit in a single wafer...

Coating apparatus – Gas or vapor deposition
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Method of forming a controlled and uniform lightly...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from gaseous state combined with subsequent...
Reexamination Certificate

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Method of forming a silicon nitride layer on a substrate

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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