4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Using film of etchant between a stationary surface and a...

Woo Tae Park

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Method of anti-stiction dimple formation under MEMS

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Method of producing microelectromechanical device with...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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