4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Pretreatment of substrate or post-treatment of coated substrate

Woo-Sung Shon

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Method of crystallizing amorphous silicon layer and...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Method of crystallizing amorphous silicon layer and...

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Reexamination Certificate

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Method of crystallizing amorphous silicon layer and...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from solid or gel state – Using heat
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2668173

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