4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Won-Kyu Kim

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Method for fabricating fine pattern in semiconductor device

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Method for forming fine patterns in semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Mutually convertible boiler between normal type and...

Liquid heaters and vaporizers – Stand boiler – Heated by liquid or steam
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Profile ID: LFUS-PAI-P-2336127

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