4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Won-Ick Jang

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Apparatus for transferring a wafer

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Optical tunable filters and optical communication device...

Optical waveguides – With optical coupler – Switch
Reexamination Certificate

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Stiction-free microstructure releasing method for...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Thermally driven micro-pump buried in a silicon substrate...

Semiconductor device manufacturing: process – Miscellaneous
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1575365

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