4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Won Hwa Jin

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Method for forming metal line of semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for forming metal wiring in semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2559988

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