4. Semiconductor device manufacturing: process
  5. Having diamond semiconductor component

Wolfgang Skorupa

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Method for producing a microelectronic semiconductor component

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Method for the targeted production of N-type conductive...

Semiconductor device manufacturing: process – Having diamond semiconductor component
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2053241

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