4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
  6. Physical stress responsive

Winfried Waldvogel

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Method of fabricating a micromechanical sensor

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Patent

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Micromechanical sensor and method for the manufacture thereof

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Micromechanical sensor including a single-crystal silicon suppor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Profile ID: LFUS-PAI-P-768812

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