4. Radiant energy
  5. Ion generation
  6. Electron bombardment type

William K. Loizides

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Decaborane ion source

Radiant energy – Ion generation – Electron bombardment type
Reexamination Certificate

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Decaborane ionizer

Radiant energy – Ion generation – Electron bombardment type
Reexamination Certificate

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In-situ monitoring on an ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2072800

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