4. Optics: measuring and testing
  5. Plural test

William A. McGahan

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Apparatus and method for the measurement of diffracting...

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
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Elemental concentration measuring methods and instruments

Optics: measuring and testing – Plural test
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High precision substrate prealigner

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Measurement of diffracting structures using one-half of the...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system
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Modeling a sample with an underlying complicated structure

Optics: measuring and testing – Dimension – Thickness
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