Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
active
Ar-based si-rich oxynitride film for dual damascene and/or...
CMP process leaving no residual oxide layer or slurry particles
CMP process leaving no residual oxide layer or slurry particles
CMP process leaving no residual oxide layer or slurry particles
Method for forming anti-reflective coating layer with...
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