4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Wen-Hsiang Tang

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Film scheme to solve high aspect ratio metal etch masking layer

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Method for forming an STI feature to avoid acidic etching of...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Method for testing for blind hole formed in wafer layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of metal etching with in-situ plasma cleaning

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Process to season and determine condition of a high density...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Profile ID: LFUS-PAI-P-450693

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