4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. On insulating substrate or layer

Wayne A. Bather

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Shallow trench isolation planarization using self aligned...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Source drain and extension dopant concentration

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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