4. Refrigeration
  5. Low pressure cold trap process and apparatus

Walter Swanson

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Apparatus and method for washing substrate

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Reexamination Certificate

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Apparatus and method for washing substrate

Brushing – scrubbing – and general cleaning – Machines – Wiping
Patent

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Method and apparatus for cryogenically cooling a deposition cham

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Profile ID: LFUS-PAI-P-171004

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