4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Walter Richardson Merry

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Apparatus for sidewall profile control during an etch process

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Microwave-activated etching of dielectric layers

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Semiconductor fabrication process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-792542

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