4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Waldemar W. Kocon

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Anisotropic nitride etch process with high selectivity to...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Process for resist clean up of metal structures on polyimide

Etching a substrate: processes – Gas phase and nongaseous phase etching on the same substrate
Reexamination Certificate

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Reactive ion etch loading measurement technique

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate

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Silicon sidewall etching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-1917015

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