4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Wade J. Hodge

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Apparatus and method for forming an oxynitride insulating...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Apparatus and method for forming an oxynitride insulating...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Apparatus and method for forming an oxynitride insulating...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Yield improvement in silicon-germanium epitaxial growth

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Polycrystalline semiconductor
Reexamination Certificate

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Yield improvement in silicon-germanium epitaxial growth

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Polycrystalline semiconductor
Reexamination Certificate

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