Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
Inventor
active
Apparatus and method for controlling a beam shape
Method and apparatus that determines charged particle beam...
Technique for writing with a raster scanned beam
No associations
LandOfFree
Volker Boegli does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Volker Boegli, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Volker Boegli will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-2074990