4. Abrading
  5. Work holder
  6. Work rotating

Vladimir Volovich

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Polishing machine and method

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Wafer carrier having more support ribs and lighter weight...

Abrading – Work holder – Work rotating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2507071

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