4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate

Vivek M. Phanse

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Low defect density (Ga, A1, In) N and HVPE process for...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
Reexamination Certificate

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Low defect density (Ga, Al, In)N and HVPE process for making...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
Reexamination Certificate

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