4. Coating apparatus
  5. Gas or vapor deposition

Vincenzo Ogliari

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Device and method for handling substrates by means of a...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Reaction chamber for an epitaxial reactor

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Reaction chamber for an epitaxial reactor

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Tool for handling wafers and epitaxial growth station

Material or article handling – Horizontally swinging load support – Swinging about pivot
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2409793

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