4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Vincente Lim

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Apparatus and methods for controlling process chamber pressure

Fluid handling – With heating or cooling of the system
Patent

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Silicon carbide constant voltage gradient gas feedthrough

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-271057

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