4. Data processing: measuring, calibrating, or testing
  5. Measurement system
  6. Measured signal processing

Vincent J. Carlos

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Contact hole profile and line edge width metrology for...

Data processing: measuring – calibrating – or testing – Measurement system – Measured signal processing
Reexamination Certificate

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Contact hole profile and line edge width metrology for...

Data processing: measuring – calibrating – or testing – Measurement system – Measured signal processing
Reexamination Certificate

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Multi-run selective pattern and etch wafer process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2825396

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