4. Optical: systems and elements
  5. Optical modulator
  6. Light wave temporal modulation

Uma Krishnamoorthy

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Integrated optical MEMS devices

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Piecewise linear spatial phase modulator using dual-mode...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Self-aligned vertical combdrive actuator and method of...

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Thinning of semiconductor substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2650402

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