4. Geometrical instruments
  5. Distance measuring
  6. Scale reading position sensor

Ulrich Benner

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Interferential position measuring arrangement

Optics: measuring and testing – By light interference – For dimensional measurement
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Optical position measuring device

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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Position measuring system

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate

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Position measuring system and method for operating a...

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate

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Scale and position measuring system for absolute position...

Geometrical instruments – Distance measuring – Scale reading position sensor
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Profile ID: LFUS-PAI-P-2794345

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