4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant

Ullrich Steiner

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Methods and apparatus for forming submicron patterns on films

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Methods and apparatus for forming submicron patterns on films

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Process for producing antireflection coatings

Etching a substrate: processes – Forming or treating optical article
Reexamination Certificate

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