4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Tzu-Li Lee

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Method for fabricating low-k dielectric and Cu interconnect

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Process for improving the reliability of interconnect...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2410495

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