4. Coating apparatus
  5. Gas or vapor deposition

Tung-Ching Tseng

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Apparatus and method for controlling a flow of process...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Chemical mechanical polisher equipped with chilled retaining...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Dual detection method for end point in chemical mechanical...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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In-line hot-wire sensor for slurry monitoring

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Chemical analysis
Reexamination Certificate

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Method for chemical mechanical polishing of a shallow trench...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2016204

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