4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Tsung-Chuan Chen

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Method for dual-damascene formation using a via plug

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Method for forming via and contact holes with deep UV...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Processing feature prior to imaging
Reexamination Certificate

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Method of improving an aspect ratio while avoiding etch stop

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2636723

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