4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Trikon Holdings Ltd.

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Apparatus and methods for sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Gas delivery system

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
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Method of treating an insulting layer

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Methods and apparatus for forming a film on a substrate

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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