4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Tri Le

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Etching a metal hard mask for an integrated circuit structure

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method and system for introducing an analyte into an ion...

Radiant energy – Ionic separation or analysis – Ion beam pulsing means with detector synchronizing means
Reexamination Certificate

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Plasma etching of organic antireflective coating

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2640308

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