4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Trevor J. Hadley

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Showerhead electrode assembly for plasma processing

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Showerhead electrode assembly for plasma processing

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Showerhead electrode for plasma processing

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Wafer transfer arm

Handling: hand and hoist-line implements – Utilizing fluid pressure – Venturi effect
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1958994

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