4. Radiation imagery chemistry: process, composition, or product th
  5. Electric or magnetic imagery, e.g., xerography,...
  6. Radiation-sensitive composition or product

Toshiyasu Shirasuna

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Apparatus and method for forming deposited film

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate

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Apparatus for forming a deposited film by plasma chemical...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus for forming a deposited film by plasma chemical...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Apparatus for preparing a functional deposited film by microwave

Coating apparatus – Gas or vapor deposition – With treating means
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Deposited film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-306623

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