4. Metal working
  5. Barrier layer or semiconductor device making

Toshihiko Noguchi

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Conveyor, method for conveying a semiconductor wafer, and...

Conveyors: power-driven – Conveyor section – Load-supporting rolls moved about endless path
Reexamination Certificate

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Defect inspecting device for substrate to be processed and...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Plasma processing apparatus capable of evaluating process...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

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Semiconductor producing apparatus comprising wafer vacuum chucki

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Semiconductor producing apparatus, and wafer vacuum chucking dev

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Profile ID: LFUS-PAI-P-1409367

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