4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Toshifumi Yokoyama

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Blank for halftone phase shift photomask and halftone phase...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Coherent light source and control method thereof, and...

Coherent light generators – Particular beam control device – Optical output stabilization
Reexamination Certificate

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Coherent light source and control method thereof, and...

Coherent light generators – Particular beam control device – Optical output stabilization
Reexamination Certificate

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Device and method for inspecting wavelength-variable...

Coherent light generators – Particular beam control device – Nonlinear device
Reexamination Certificate

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Halftone phase shift photomask and blank for halftone phase...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-872138

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