4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Toshiba Machine Co. Ltd

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Barrel type of epitaxial vapor phase growing apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer heating device and method of controlling the same

Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Reexamination Certificate

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